发明名称 GROWTH METHOD OF GALLIUM NITRIDE SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a growth method of a gallium nitride single crystal using a novel melt which can prevent wetting-up of the melt and deterioration of a reaction vessel, and which is not intermingled into a grown GaN single crystal as an impurity. ! SOLUTION: In a growth method, a melt is obtained by melting a raw material comprising tin, gallium, and one or more kinds of metals selected from a group comprising alkali metals and alkaline earth metals, and the melt and a gas phase containing a nitrogen source as an indispensable are heated in the contact state, to thereby grow a gallium nitride single crystal. ! COPYRIGHT: (C)2014,JPO&INPIT
申请公布号 JP2014152066(A) 申请公布日期 2014.08.25
申请号 JP20130022403 申请日期 2013.02.07
申请人 ASAHI GLASS CO LTD 发明人 HASEGAWA TOMOHARU ; YAMANE HISANORI
分类号 C30B29/38;C30B9/10;H01L21/208 主分类号 C30B29/38
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