| 摘要 |
This sample observation device is provided with: a charged particle optical column which, by means of a first acceleration voltage, irradiates a charged particle beam onto a sample including an area of observation, which is a recessed area; an image acquisition unit which acquires an image including the area of observation from a signal obtained by irradiation with the charged particle beam; a storage unit which stores in advance, for each of multiple acceleration voltages, information indicating the relation between the brightness ratio between the recessed area and the periphery of said recessed area in a standard sample, and a value indicating the structure of the recessed part in the standard sample; and a calculation unit which calculates the brightness ratio between the recessed part and the periphery of the recessed part in the image. The calculation unit determines the adequacy of the first acceleration voltage by using the information indicating the relation, and the brightness ratio in the image. |
