METHOD OF PERFORMING PROCESSES WITH CALIBRATING TAGET VALUES AND PROCESSING SYSTEMS HAVING A CONFIGURATION OF CALIBRATING THE SAME

摘要

The present invention relates to a method of performing processes by calibrating a target value and a processing system. A method of performing processes by calibrating a target value according to one embodiment of the present invention includes a step of measuring the first error values of first regions; a step of estimating the second error values of second regions; and a step of generating estimate data including the first error values and the second error values.