发明名称 SEMICONDUCTOR DEVICE WITH BURIED BIT LINE AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device includes: a punch stop region formed in a substrate; a plurality of buried bit lines formed over the substrate; a plurality of pillar structures formed over the buried bit lines; a plurality of word lines extending to intersect the buried bit lines and being in contact with the pillar structures; and an isolation layer isolating the word lines from the buried bit lines.
申请公布号 US2014232014(A1) 申请公布日期 2014.08.21
申请号 US201414264832 申请日期 2014.04.29
申请人 SK hynix Inc. 发明人 CHO Heung-Jae;JEON Bong-Seok
分类号 H01L23/48;H01L27/108 主分类号 H01L23/48
代理机构 代理人
主权项 1. A semiconductor device comprising: a punch stop region formed in a substrate; a plurality of buried bit lines formed over the substrate; a plurality of pillar structures formed over the buried bit lines; a plurality of word lines extending to intersect the buried bit lines and being in contact with the pillar structures; and an isolation layer isolating the word lines from the buried bit lines.
地址 Gyeonggi-do KR