发明名称 PHASE CHANGE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 Disclosed are a phase change memory device and a method of manufacturing the same. The phase change memory device includes an insulator substrate; a catalyst terminal which is formed on the insulator substrate; an electrode layer which includes carbon nanotubes, which are formed on the surface of a substrate from the catalyst terminal in a longitudinal direction and have a gap electrically isolated at a certain point, and a metal electrode fixed to both sides of the carbon nanotubes; and a phase change material which is formed in the gap by a self-alignment method and electrically touches the carbon nanotubes.
申请公布号 KR101431684(B1) 申请公布日期 2014.08.20
申请号 KR20120130404 申请日期 2012.11.16
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
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