| 摘要 |
<p>A mapping device maps the presence or location of multiple wafers and is installed on a port door moving up and down in order to close or open a storing port for storing and transferring wafers to transfer the wafers. The present invention relates to a mapping device with an integrated mapping bar which detects the presence and location of wafers. The mapping device comprises a mapping sensor including a transmitter and a receiver; a mapping bar in which the transmitter and the receiver of the mapping sensor are placed at both ends, respectively, to face each other; one or more transport members installed on the mapping bar to be able to rotate; a first cylinder rotating the transport member; and a joining unit to which the transport member and the first cylinder are fixed to be able to rotate and which is combined with the port door. Accordingly, provided is a mapping device with an integrated mapping bar detecting the presence and location of wafers, wherein the mapping sensor is integrated with and fixed to the mapping bar in order for the transmitter and the receiver to face each other in symmetry and rotate the transmitter and the receiver based on the forward and backward movement of the first cylinder.</p> |
