Method of electron beam imaging of a specimen by combining images of an image sequence

摘要

A method of imaging of a specimen exposed to an electron beam signal includes acquiring an image sequence of sequential images of the specimen. Each subsequent image in the image sequence represents increased cumulative electron beam signal exposure on the specimen. The method includes collecting cumulative exposure data for each image of the image sequence. The method includes applying a low-pass image processing filter to the images of the image sequence using the cumulative exposure data corresponding to each image to which the filter is being applied to produce processed images. The method includes combining the processed images to produce a final image. A method of imaging is also provided that includes selectively discarding images in the image sequence.

主权项

1. A method of imaging of a specimen exposed to an electron beam signal, the method comprising the steps of:
acquiring an image sequence of sequential images of the specimen, each subsequent image in the image sequence representing increased cumulative electron beam signal exposure on the specimen; collecting cumulative exposure data for each image of the image sequence; applying a low-pass image processing filter to the images of the image sequence using the cumulative exposure data corresponding to each image to which the filter is being applied to produce processed images; and combining the processed images to produce a final image.