| 摘要 |
<p>PURPOSE: A susceptor for display substrates is provided to prevent disconnection of heaters or break down of protective layers due to thermal stress by equipping one or more low thermal expansion portions embedded inside a body part. CONSTITUTION: A susceptor (100a) for display substrates comprises a body part (410) and one or more of low thermal expansion parts (201). The body part includes aluminum and a substrate is settled on the body part. A heater (162) which heats the substrate is embedded. The low thermal expansion part comprises carbons and is embedded inside the body part and is brazing-welded with the body part. The coefficient of thermal expansion of the low thermal expansion part is lower than the same of the body portion. The low thermal expansion part comprises a hybrid complex which includes carbons. The hybrid complex comprises a carbon body and a metalizing layer which surrounds the outer surface of the carbon body.</p> |
