Optical waveguide directional coupler and method for making same

摘要

An optical waveguide directional coupler includes a base and a Y-shaped optical waveguide formed in the base. The base includes a planar member and a ridge member extending from a side of the planar member. The planar member includes a top surface. The ridge member includes a recessed planar portion and a raised portion raised relative to the recessed planar portion and perpendicularly extending from the planar member. The raised portion has an upper surface coplanar with the top surface. The Y-shaped optical waveguide is exposed to the upper surface and the top surface. One end of the Y-shaped optical waveguide is exposed to an end of the ridge member, and the other two ends are exposed to an end of the planar member.

主权项

1. A method for making an optical waveguide directional coupler, comprising:
providing a base, the base comprising a planar member and a ridge member extending from a side of the planar member, the planar member comprising a top surface, the ridge member comprising a recessed planar portion and a raised portion raised relative to the recessed planar portion and perpendicularly extending from the planar member, the raised portion having an upper surface coplanar with the top surface; forming an optical guiding layer on a part of the upper surface and the entire top surface; forming a photo-resist layer on the entire optical guide layer; forming a Y-shaped photo-resist layer on the optical guiding layer; etching the optical guiding layer to obtain a Y-shaped optical guiding layer; removing the Y-shaped photo-resist layer from the optical guiding layer; and heating the base and the Y-shaped optical guiding layer to diffuse the Y-shaped optical guiding layer in the base, thereby forming an optical waveguide directional coupler with a Y-shaped optical waveguide.