发明名称 METHOD OF NANO WIRE ELECTRODE ARRAY INCLUDING COPPER NANO WIRE PATTERN
摘要 The present invention relates to a manufacturing method of a nano wire electrode array including a copper nano wire pattern. The manufacturing method comprises a step of preparing a copper precursor/organic polymer complex solution by mixing a copper precursor and an organic material with distilled water or organic solvent; a step of forming a copper precursor/organic polymer nano wire pattern which is arranged vertically from a substrate by loading the copper precursor/organic polymer complex solution on the substrate; and a step of forming an arranged copper nano wire pattern by heating the arranged copper precursor/organic polymer nano wire pattern. Therefore, the position and direction of the copper nano wire pattern can be controlled accurately and the copper nano wire pattern can be arranged in a desire direction. Therefore, a nano electrode array, in which the resolution of the nano wire pattern is improved, can be provided. Also, the manufacturing method of the nano wire electrode array in which a manufacturing process is fast and simplified can be provided.
申请公布号 KR20140098660(A) 申请公布日期 2014.08.08
申请号 KR20130142934 申请日期 2013.11.22
申请人 POSTECH ACADEMY-INDUSTRY FOUNDATION 发明人 LEE, TAE WOO;LEE, YEONG JUN
分类号 H01L21/283 主分类号 H01L21/283
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