发明名称 PRODUCTION METHOD FOR INFRARED RADIATION REFLECTING FILM
摘要 This infrared radiation reflecting film (100) is provided with, in order, an infrared radiation reflecting layer (20) having a metal layer (25) and metal oxide layers (21, 22), and a transparent protective layer (30) on a transparent film substrate (10). In this production method, the metal oxide layers are formed by DC sputtering using a winding sputtering apparatus. The sputtering target used in DC sputtering contains zinc atoms and tin atoms. The sputtering target is preferably obtained by sintering a metal powder, and at least one metal oxide among zinc oxide and tin oxide.
申请公布号 WO2014119668(A1) 申请公布日期 2014.08.07
申请号 WO2014JP52132 申请日期 2014.01.30
申请人 NITTO DENKO CORPORATION 发明人 WATANABE, MASAHIKO;OHMORI, YUTAKA
分类号 C23C14/34;B32B9/00;B32B38/00;C23C14/06;C23C14/08;G02B5/26;G02B5/28 主分类号 C23C14/34
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