| 摘要 |
PURPOSE: A manufacturing device for a multi-layer thin firm mirror and a grade mirror thereof are provided to narrow solid colors' full width at half maximum (FWHM) by making each thin film have a certain grade corresponding to the incidence angle of X-rays. CONSTITUTION: A multi-layer thin film mirror manufacturing device includes a substrate (10), a mask unit (20), an energy-generating unit (40), and a target (30). The substrate is fixed on a substrate supporting unit and target atoms are evaporated on the substrate. The mask unit is located at a certain interval from the substrate and a mask (25) through which the target atoms pass is formed. The target atoms are scattered by an energy source, which is radiated by the energy-generating unit. The mask unit is moved at a limited speed. |
