发明名称 INK JET DEVICE AND DROPLET MEASUREMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an ink jet device and a droplet measurement method which accurately measure an amount of ink droplets.SOLUTION: An ink jet device 1 according to one embodiment of the invention includes: head parts 121 to 126; a stage 11; a light source 161; a light receiving part 162; and a controller 15. The stage 11 is formed so as to support the substrate S to which droplets are applied and move relative to the head parts 121 to 126. The light source 161 is formed so as to radiate illumination light L1 to the droplets D on the substrate S. The light receiving part 162 is formed to receive reflection light L2 of the illumination light L1 from the droplets D. The controller 15 is formed so as to obtain information regarding an amount of the droplets D on the basis of the strength of the reflection light L2 received by the light receiving part 162.
申请公布号 JP2014140810(A) 申请公布日期 2014.08.07
申请号 JP20130010441 申请日期 2013.01.23
申请人 ULVAC JAPAN LTD 发明人 IGUCHI SHINSUKE;YANOME YUJI;ENDO SHIGERU;SEISHIN TAKAHITO;TAKITA TOMOHARU
分类号 B05C11/00;B05D1/26;B05D3/00;B41J2/01;G01F22/00;H01L51/50;H05B33/10 主分类号 B05C11/00
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