Deformable mirror having force actuators and distributed stiffness

摘要

The present invention relates to a deformable mirror (1) comprising a deformable membrane (2) with a reflective outer face (3) and an opposite face (4), a rigid support plate (7), and at least one force actuator (5, 6). Each actuator (5, 6) comprises at least two elements (5, 6) suitable for interacting with each other remotely so as to generate a force in a direction that is substantially perpendicular to the surface of the initially non-deformed membrane (2), and suitable for being displaced relative to each other in the direction of said generated force so as to cause said membrane (2) to be deformed locally. One of the two elements (5, 6) is incorporated into the support plate (7) and the other element is coupled to the membrane (2). One of said two elements (5, 6) is suitable for controlling the intensity of said generated force. According to the invention, the mirror (1) further comprises reference means (7, 8) coupled to the membrane (2) via at least one rigid link means (10) and via at least one flexible link means (11). Each rigid link means (10) is secured to said membrane (2), and each flexible link means (11) is secured at least in part to the reference means (7, 8).

主权项

1. A deformable mirror (1) comprising a deformable membrane (2) with a reflective outer face (3) and an opposite face (4), a rigid support plate (7), and at least one force actuator (5, 6), each actuator (5, 6) comprising at least two elements (5, 6) suitable for interacting with each other remotely so as to generate a force in a direction that is substantially perpendicular to the surface of the initially non-deformed membrane (2), and suitable for being displaced relative to each other in the direction of said generated force so as to cause said membrane (2) to be deformed locally, one of the two elements (5, 6) being incorporated into the support plate (7) and the other element being coupled to said membrane (2), one of said two elements (5, 6) being suitable for controlling the intensity of said generated force, said deformable mirror (1) being characterized in that it further comprises reference means (8) coupled to said membrane (2) via a plurality of links, each of which comprises at least one rigid link means (10) and at least one flexible link means (11), each rigid link means (10) being connected to said membrane (2), each flexible link means (11) being connected at least in part to the reference means (8), and said reference means (8) being common to said plurality of links (10, 11), wherein the reference means (8) comprises an intermediate support plate (8) disposed between the membrane (2) and the support plate (7).