Joint system, joint method, program and computer storage medium

摘要

A joint system includes: a transfer-in/out station capable of holding a plurality of substrates or a plurality of superposed substrates, and transferring-in/out the substrates or superposed substrates to/from a processing station; and the processing station performing predetermined processing on the substrates and joining the substrates together. The processing station includes: a surface activation apparatus activating a front surface of the substrate; a surface hydrophilizing apparatus hydrophilizing and cleaning the front surface of the substrate; a joint apparatus joining the substrates together; and a transfer region for transferring the substrate or superposed substrate to the surface activation apparatus, the surface hydrophilizing apparatus, and the joint apparatus.

主权项

1. A joint system joining substrates together, comprising:
a processing station performing predetermined processing on substrates and joining the substrates together; and a transfer-in/out station capable of holding a plurality of substrates or a plurality of superposed substrates in which the substrates are joined together, and transferring-in/out the substrates or superposed substrates to/from said processing station, wherein said processing station comprises:
a surface activation apparatus activating a front surface to be joined of the substrate;a surface hydrophilizing apparatus hydrophilizing the front surface of the substrate activated in said surface activation apparatus;a joint apparatus joining the substrates having the surfaces hydrophilized in said surface hydrophilizing apparatus together; anda transfer region for transferring the substrate or superposed substrate to said surface activation apparatus, said surface hydrophilizing apparatus, and said joint apparatus, wherein a pressure inside said transfer region is equal to or more than an atmospheric pressure, a pressure inside said joint apparatus is positive with respect to a pressure inside said transfer region, and the pressure inside said transfer region is positive with respect to a pressure inside said surface activation apparatus, a pressure inside said surface hydrophilizing apparatus, and a pressure inside said transfer-in/out station.