| 摘要 |
On an upper surface of a fixed substrate 22, a plurality of strap-shaped base electrodes 27 are arranged in parallel to each other. On each of the base electrodes 27, an electret 28 is formed. The electret 28 has a width wider than the width of each base electrode 27, and the electret 28 covers an exposed surface of the base electrode 27. A movable substrate 23 is disposed in parallel to and facing the surface of the fixed substrate 22 where the electrets 28 and others are formed. The movable substrate 23 is movable relatively to the fixed substrate 22. On a facing surface of the movable substrate 23, strip-shaped counter electrodes 32 are each formed so as to face each base electrode 27. |
