发明名称 APPARATUS OF PROBE FOR KELVIN TEST
摘要 <p>The present invention relates to a probe device for a Kelvin test by being in contact with a terminal of a device. The probe device comprises a contact layer stacked on the lower end and having conductivity; an interposer layer stacked on the upper part of the contact layer and including a plurality of openings; a first probe inserted into the opening of the interposer layer and in contact with the contact layer at one end; a second probe in contact with the upper part of the interposer layer at one end; and a load board in contact with the other end of the probes and fixing the probes. The interposer layer short-circuits the probes so as to perform a Kelvin test even with lower integration than a width of the terminal of the device.</p>
申请公布号 KR101426031(B1) 申请公布日期 2014.08.04
申请号 KR20130092988 申请日期 2013.08.06
申请人 QUALMAX TESTECH, INC. 发明人 CHOI, JONG KOOK;SEO, JEONG YUN
分类号 G01R1/067;G01R31/26;H01L21/66 主分类号 G01R1/067
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