发明名称 |
APPARATUS OF PROBE FOR KELVIN TEST |
摘要 |
<p>The present invention relates to a probe device for a Kelvin test by being in contact with a terminal of a device. The probe device comprises a contact layer stacked on the lower end and having conductivity; an interposer layer stacked on the upper part of the contact layer and including a plurality of openings; a first probe inserted into the opening of the interposer layer and in contact with the contact layer at one end; a second probe in contact with the upper part of the interposer layer at one end; and a load board in contact with the other end of the probes and fixing the probes. The interposer layer short-circuits the probes so as to perform a Kelvin test even with lower integration than a width of the terminal of the device.</p> |
申请公布号 |
KR101426031(B1) |
申请公布日期 |
2014.08.04 |
申请号 |
KR20130092988 |
申请日期 |
2013.08.06 |
申请人 |
QUALMAX TESTECH, INC. |
发明人 |
CHOI, JONG KOOK;SEO, JEONG YUN |
分类号 |
G01R1/067;G01R31/26;H01L21/66 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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