发明名称 SURFACE PROCESSING METHOD AND DEVICE OF THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a surface processing technique which can efficiently form fine concavo-convex shapes on the surface of processed members.SOLUTION: A surface processing device 10 according to an embodiment includes an irradiation unit 30 which applies pulsed electron beam toward a surface 22 of a cylindrical member 20 to be processed, a drive unit 40 which drives the cylindrical member 20 so as to rotate the cylindrical member 20, and a control unit 50 which controls coordinately the irradiation part 30 and the drive unit 40. A surface processing method includes a step which, by carrying out one pulse irradiation of the electron beam to the predetermined irradiated domain over the surface 22 of the cylindrical member 20, forms a concave shape on the irradiated domain and a step which alters the irradiated domain to a different domain from the irradiated domain the concave shape is formed over the surfaces 22 of the cylindrical member 20.</p>
申请公布号 JP2014138949(A) 申请公布日期 2014.07.31
申请号 JP20130008632 申请日期 2013.01.21
申请人 TOSHIBA CORP 发明人 TANAKA AKIRA;SAYANO AKIO
分类号 B23K15/00 主分类号 B23K15/00
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