Chemical and physical templates for forming patterns using directed self-assembly materials

摘要

A method includes forming a chemical guide layer above a process layer. A template having a plurality of elements is formed above the process layer. The chemical guide layer is disposed on at least portions of the process layer disposed between adjacent elements of the template. A directed self-assembly layer is formed over the chemical guide layer. The directed self-assembly layer has alternating etchable components and etch-resistant components. The etchable components of the directed self-assembly layer are removed. The process layer is patterned using the template and the etch-resistant components of the directed self-assembly layer as an etch mask.

主权项

1. A method, comprising:
forming a chemical guide layer above a process layer, wherein the chemical guide layer comprises a neutral layer; forming a template having a plurality of elements above the process layer, wherein the chemical guide layer is disposed on at least portions of the process layer disposed between adjacent elements of the template and the neutral layer covers portions of the process layer disposed between adjacent elements of the template and wherein the neutral layer includes gaps exposing portions of the process layer, the exposed portions of the process layer comprising a pinning material for a directed self-assembly layer; forming the directed self-assembly layer over the chemical guide layer, the directed self-assembly layer having alternating etchable components and etch-resistant components; removing the etchable components of the directed self-assembly layer; and patterning the process layer using the template and the etch-resistant components of the directed self-assembly layer as an etch mask.