发明名称 MICROELECTRONIC DEVICE FOR DETERMINATION OF THICKNESS OF EPITAXIAL LAYERS IN SEMICONDUCTORS
摘要 A microelectronic device for the determination of thickness of epitaxial layers in semiconductors includes a light source and epitaxial structure that are connected to each other in sequence. Additionally it comprises a unit for signal processing and indication, microelectronic frequency converter that includes a photoresistor, resistor, first and second field transistors, inductance, restriction capacitor, two output terminals and a DC power source.
申请公布号 UA91868(U) 申请公布日期 2014.07.25
申请号 UA20130006636U 申请日期 2013.05.28
申请人 ВІННИЦЬКИЙ НАЦІОНАЛЬНИЙ ТЕХНІЧНИЙ УНІВЕРСИТЕТ 发明人 Осадчук Володимир Степанович;Осадчук Олександр Володимирович;Дуда Роман Валерійович
分类号 G01N27/12 主分类号 G01N27/12
代理机构 代理人
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