发明名称 NANOCRYSTAL THIN FILM DEVICE FABRICATION METHODS AND APPARATUS
摘要 Nanocrystal thin film devices and methods for fabricating nanocrystal thin film devices are disclosed. The nanocrystal thin films are diffused with a dopant such as Indium, Potassium, Tin, etc. to reduce surface states. The thin film devices may be exposed to air during a portion of the fabrication. This enables fabrication of nanocrystal-based devices using a wider range of techniques such as photolithography and photolithographic patterning in an air environment.
申请公布号 WO2014113655(A2) 申请公布日期 2014.07.24
申请号 WO2014US12023 申请日期 2014.01.17
申请人 THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA 发明人 KAGAN, CHERIE, R.;KIM, DAVID, K.;CHOI, JI-HYUK;LAI, YUMING
分类号 H01L21/20 主分类号 H01L21/20
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