发明名称 SPRAY NOZZLE, SPRAYING PROCESSING DEVICE, PROCESSING METHOD, METHOD FOR MANUFACTURING CELL MATERIAL, AND SECONDARY CELL
摘要 A spray nozzle is provided with: a spraying opening for spraying a fluid mixture composed of particles and a gas; a first flow channel that extends in a first direction up to the spraying opening; a flow distribution region provided on the opposite side of the spraying opening of the first flow channel and comprising a plurality of flow distribution channels aligned in a direction intersecting the first direction; a second flow channel that carries the particles in a second direction that forms a predetermined angle with respect to the first direction and causes the particles to merge into the flow distribution region; and a third flow channel that sprays a gas into the first flow channel.
申请公布号 WO2014112559(A1) 申请公布日期 2014.07.24
申请号 WO2014JP50689 申请日期 2014.01.16
申请人 NIKON CORPORATION 发明人 SEPASY ZAHMATY, MOHAMMAD SAEED;SEKIMOTO, TATSUYA
分类号 C23C24/04;B05B7/14;C23C4/00;H01M4/04 主分类号 C23C24/04
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