| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device that is able to obtain an image of an inspection object with a large contrast, thus making it possible to improve inspection accuracy.SOLUTION: An inspection device according to the present technique comprises: an upper illuminator; a lower illuminator; an imaging part; and a control part. The upper illuminator emits light to an inspection surface having an inspection object. The lower illuminator emits light to the inspection surface at an illumination angle of 15 degrees or more but 25 degrees or less, which is smaller than that in the upper illuminator. The imaging part obtains a first image by imaging the inspection object to which the upper illuminator emits light. Also, the imaging part obtains a second image by imaging the inspection object to which the lower illuminator emits light. The control part inspects the inspection object based on the first image and second image. |
