A method and apparatus for forming a magnetic film on a substrate

摘要

A method of forming a magnetic structure on a substrate 44 by depositing a matrix material onto a substrate and depositing magnetic particles onto the matrix as it forms where each magnetic particle comprises a core at least partially covered with a layer of metal. Apparatus for performing the method comprises an atomic beam of matrix material (e.g. generated by sputtering an evaporator such as an MBE source 32) and a beam of magnetic particles from a cluster source 34 such as a gas aggregation source. The magnetic particles are passed through at least one thermal evaporator 36 & 38 to apply the metal coating. The particles are then passed through a venturi 40 by which they are accelerated towards the substrate 44