| 发明名称 | High-sensitivity transparent gas sensor and method for manufacturing the same | ||
| 摘要 | Disclosed are a high-sensitivity transparent gas sensor and a method for manufacturing the same. The transparent gas sensor includes a transparent substrate, a transparent electrode formed on the transparent substrate and a transparent gas-sensing layer formed on the transparent electrode. The transparent gas-sensing layer has a nanocolumnar structure having nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns. | ||
| 申请公布号 | US8785924(B2) | 申请公布日期 | 2014.07.22 |
| 申请号 | US201213542874 | 申请日期 | 2012.07.06 |
| 申请人 | Korea Institute of Science and Technology | 发明人 | Jang Ho Won;Yoon Seok Jin;Kim Jin Sang;Kang Chong Yun;Choi Ji Won;Moon Hi Gyu |
| 分类号 | H01L29/82 | 主分类号 | H01L29/82 |
| 代理机构 | Ladas & Parry LLP | 代理人 | Ladas & Parry LLP |
| 主权项 | 1. A transparent gas sensor comprising: a transparent substrate; a transparent electrode formed on the transparent substrate; and a transparent gas-sensing layer formed on the transparent electrode, wherein the transparent gas-sensing layer has a nanocolumnar structure comprising nanocolumns formed on the transparent electrode and gas diffusion pores formed between the nanocolumns, wherein the nanocolumns are formed to be inclined with an angle of 60-89° by glancing angle deposition, and the gas diffusion pores are formed in a self-shadowed region where the deposition does not occur. | ||
| 地址 | Seoul KR | ||