发明名称 |
Process for forming an electroactive layer |
摘要 |
There is provided a process for forming a layer of electroactive material having a substantially flat profile. The process includes: providing a workpiece having at least one active area; depositing a liquid composition including the electroactive material onto the workpiece in the active area, to form a wet layer; treating the wet layer on the workpiece at a controlled temperature in the range of −25 to 80° C. and under a vacuum in the range of 10−6 to 1,000 Torr, for a first period of 1-100 minutes, to form a partially dried layer; heating the partially dried layer to a temperature above 100° C. for a second period of 1-50 minutes to form a dried layer. |
申请公布号 |
US8778708(B2) |
申请公布日期 |
2014.07.15 |
申请号 |
US201013203270 |
申请日期 |
2010.03.08 |
申请人 |
E I du Pont de Nemours and Company |
发明人 |
Chesterfield Reid John;Butler Justin;Sant Paul Anthony |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
1. A process for forming a layer of electroactive material, comprises:
providing a workpiece having at least one active area; depositing a liquid composition comprising the electroactive material onto the workpiece in the active area, to form a wet layer; treating the wet layer on the workpiece at a controlled temperature in the range of −25 to 80° C. and under a vacuum in the range of 10−6 to 1,000 Torr, for a first period of 1-100 minutes, to form a partially dried layer; heating the partially dried layer to a temperature above 100° C. for a second period of 1-50 minutes to form a dried layer,wherein the dried layer has a substantially flat profile in the active area; and wherein the vacuum is applied by means of a pump selected from the group consisting of dry vacuum pumps, turbo pumps, rotary vane vacuum pumps, oil diffusion pumps, cryogenic pumps, and sorption pumps. |
地址 |
Wilmington DE US |