发明名称 Process for forming an electroactive layer
摘要 There is provided a process for forming a layer of electroactive material having a substantially flat profile. The process includes: providing a workpiece having at least one active area; depositing a liquid composition including the electroactive material onto the workpiece in the active area, to form a wet layer; treating the wet layer on the workpiece at a controlled temperature in the range of −25 to 80° C. and under a vacuum in the range of 10−6 to 1,000 Torr, for a first period of 1-100 minutes, to form a partially dried layer; heating the partially dried layer to a temperature above 100° C. for a second period of 1-50 minutes to form a dried layer.
申请公布号 US8778708(B2) 申请公布日期 2014.07.15
申请号 US201013203270 申请日期 2010.03.08
申请人 E I du Pont de Nemours and Company 发明人 Chesterfield Reid John;Butler Justin;Sant Paul Anthony
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项 1. A process for forming a layer of electroactive material, comprises: providing a workpiece having at least one active area; depositing a liquid composition comprising the electroactive material onto the workpiece in the active area, to form a wet layer; treating the wet layer on the workpiece at a controlled temperature in the range of −25 to 80° C. and under a vacuum in the range of 10−6 to 1,000 Torr, for a first period of 1-100 minutes, to form a partially dried layer; heating the partially dried layer to a temperature above 100° C. for a second period of 1-50 minutes to form a dried layer,wherein the dried layer has a substantially flat profile in the active area; and wherein the vacuum is applied by means of a pump selected from the group consisting of dry vacuum pumps, turbo pumps, rotary vane vacuum pumps, oil diffusion pumps, cryogenic pumps, and sorption pumps.
地址 Wilmington DE US