发明名称 |
METHOD AND DEVICE FOR CALCULATING LIGHT QUANTITY DISTRIBUTION, RECORDING MEDIUM RECORDING PROGRAM FOR CALCULATING LIGHT QUANTITY DISTRIBUTION, AND METHOD AND DEVICE FOR EXPOSURE |
摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently and highly accurately calculate light quantity distribution information on a pupil surface of a projection optical system of diffraction light generated from a pattern.SOLUTION: A method for calculating light quantity distribution information on a projection pupil surface of light from a pattern formed on a predetermined surface with a thin film having a plurality of layers with mutually different complex diffraction indexes includes: a step 116 for inputting information on an illumination pupil which illuminates the pattern; steps 124, 126 for sequentially calculating at least one of the transmissivity and the reflectivity when a light flux from portion of the illumination pupil passes through a boundary surface of the plurality of layers in the pattern, and calculating a first complex amplitude distribution on a virtual surface of the light flux after passing through the pattern; and a step 128 for calculating a second complex amplitude distribution on the projection pupil surface by performing Fourier transformation of the first complex amplitude distribution.</p> |
申请公布号 |
JP2014130971(A) |
申请公布日期 |
2014.07.10 |
申请号 |
JP20120289127 |
申请日期 |
2012.12.28 |
申请人 |
NIKON CORP |
发明人 |
FUJII KOICHI ; IMAI MOTOMASA |
分类号 |
H01L21/027;G02B13/00;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|