| 摘要 |
PROBLEM TO BE SOLVED: To make a potential of an extraction electrode 6 lower than that of a cathode 5 at the off control of radiation in one extraction electrode power supply 10 and to make the off control of radiation certain, in a radiation generation unit 1 comprising the cathode 5 heated by a cathode heater 4, the extraction electrode 6 extracting electrons from the heated cathode 5, a cathode heater power supply 9 connected with the cathode heater 4, and the extraction electrode power supply 10 connected with the extraction electrode 6, the radiation generation unit 1 generating radiation by irradiating a radiation generation target 3 with electrons from the cathode 5.SOLUTION: A positive electrode of the cathode heater power supply 9 is connected to the cathode 5, and a positive electrode of the extraction electrode power supply 10 is connected to the extraction electrode 6. A negative electrode of the cathode heater power supply 9 and a negative electrode of the extraction electrode power supply 10 are connected with each other, and the cathode heater power supply 9 and the extraction electrode power supply 10 are connected in series between the extraction electrode 6 and the cathode 5. |
