INDUCTOR WITH LAMINATED YOKE

摘要

A method for forming a thin film inductor having yokes, one or more of which is laminated, and one or more conductors passing between the yokes. The laminated yoke or yokes help reduce eddy currents and/or hysteresis losses.

主权项

1. A method, comprising:
forming a bottom yoke above a substrate; forming one or more conductors above the bottom yoke and separated therefrom by an insulating material; and forming a top yoke above the one or more conductors and separated therefrom by an insulating material; wherein at least one of forming the bottom yoke and forming the top yoke includes a procedure comprising:
applying a first mask;depositing a first ferromagnetic layer in an area not masked by the first mask;depositing a nonmagnetic layer above the first ferromagnetic layer;applying a second mask above the nonmagnetic layer; anddepositing a second ferromagnetic layer in an area not masked by the second mask.