| 发明名称 |
METHOD FOR MANUFACTURING CHARGED PARTICLE BEAM LENS |
| 摘要 |
There is provided a method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a first conductive substrate having a first through-hole and a second conductive substrate having a second through-hole. The above method includes: forming the first through-hole in the first conductive substrate; forming the second through-hole in the second conductive substrate; and bonding the first conductive substrate and the second conductive substrate so that the first through-hole and the second through-hole communicate with each other. |
| 申请公布号 |
US2014190006(A1) |
申请公布日期 |
2014.07.10 |
| 申请号 |
US201214005037 |
申请日期 |
2012.03.14 |
| 申请人 |
Setomoto Yutaka;Kato Takahisa |
发明人 |
Setomoto Yutaka;Kato Takahisa |
| 分类号 |
H05K3/46 |
主分类号 |
H05K3/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a first conductive substrate having a first through-hole and a second conductive substrate having a second through-hole, the method comprising:
forming the first through-hole in the first conductive substrate; forming the second through-hole in the second conductive substrate; and bonding the first conductive substrate and the second conductive substrate so that the first through-hole and the second through-hole communicate with each other. |
| 地址 |
Tokyo JP |
