Organoaminosilane precursors and methods for making and using same

摘要

Described herein are organoaminosilane precursors which can be used to deposit silicon containing films which contain silicon and methods for making these precursors. Also disclosed herein are deposition methods for making silicon-containing films or silicon containing films using the organoaminosilane precursors described herein. Also disclosed herein are the vessels that comprise the organoaminosilane precursors or a composition thereof that can be used, for example, to deliver the precursor to a reactor in order to deposit a silicon-containing film.

主权项

1. An organoaminosilane represented by one of the following Formulas A, B, or C: wherein R is independently selected from a C3 to C10 branched, alkyl group; a C3 to C10 cyclic alkyl group; a C5 to C10 aromatic group; a C3 to C10 saturated or unsaturated heterocyclic group; a linear or a branched C3 to C10 alkenyl group; a C1 to C10 alkoxy group; a C1 to C10 alkylamino group; and in Formula C, R can also be a silyl group with or without substituents; wherein R1 is independently selected from a C3 to C10 linear, branched alkyl group; a C3 to C10 cyclic alkyl group; a C5 to C10 aromatic group; a C3 to C10 saturated or unsaturated heterocyclic group; a hydrogen atom; a linear or a branched C3 to C10 alkenyl group; a C1 to C10 alkoxy group; a C1 to C10 alkylamino group; or a silyl group with substituents; and wherein R2 represents a single bond; a saturated or unsaturated, linear or branched, substituted or unsubstituted hydrocarbon chain wherein a number of carbon atoms ranges ranging from 1 to 10; a saturated or unsaturated carbocyclic or heterocyclic ring; SiR2; or SiH2, and wherein R and R1 in Formula A are also combinable to form a cyclic group and wherein anyone or more of R, R1 and R2 in Formula C are also combinable to form a cyclic group provided that the organoaminosilane is one selected from the group consisting of the following:
(a) the organoaminosilane comprises 1-silyl-7-azaindole;(b) the organoaminosilane comprises N-silyl-2,5-dimethylpyrrole;(c) the organoaminosilane having Formula B wherein R is a substituted C5-C10 aromatic group comprising one or more of the following substituents: an alkyl group, an alkenyl group, and an alkoxy group;(d) the organoaminosilane having Formula B wherein R is a substituted C2 to C10 alkyl group wherein the alkyl group is substituted with one or more of the following: a hetero atom, an aromatic group, an alkylamino group, or an alkoxy group.