Method for coating micromechanical parts with high tribological performances for application in mechanical systems

摘要

Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising:
providing a substrate component to be coated;providing said component with a diamond coating;;wherein diamond coating is provide by CVD in a reaction chamber and during CVD deposition, during the last portion of the growth process, a controlled change of the carbon content within the reaction chamber is provided, thereby providing a change of the sp2/sp3 carbon bonds in the vicinity of the surface. Corresponding micromechanical components are also provided.

主权项

1. A method for coating micromechanical components of a micromechanical system, including a watch movement, comprising:
providing a substrate component to be coated; and providing said substrate component with a diamond coating, on a surface of said substrate component, of a given final thickness; wherein said diamond coating is provided by CVD deposition in a reaction chamber; wherein in a first phase of the CVD deposition process only sp3 hybridised carbon is deposited on said substrate over a first thickness; wherein during a second phase of CVD deposition process, a controlled change of the carbon content within the reaction chamber is provided, thereby providing a change of the sp2/sp3 carbon bonds in a vicinity of the surface over a second thickness thereby forming an outer layer having a top, exterior surface; and wherein the change of sp2/sp3 carbon bond is such that there is a gradual increase of sp2 hybridised carbon content towards the top, exterior surface.