DEPOSITION SYSTEM FOR MANUFACTURING OLED

摘要

Disclosed is a deposition system to manufacture OLED. According to an embodiment of the present invention, the deposition system to manufacture OLED includes: a carrier which includes a chuck where a substrate is chucked and attached to, and a push-pin module which pushes the substrate attached to the chuck to detach the substrate from the chuck; and a push-pin module driving unit which is at least partially arranged on the upper part of the carrier and drives the push-pin module during the process of detaching the substrate.