VACUUM MACHINE FOR TURNING OVER SUBSTRATE AND DRIVING DEVICE FOR ROTATING THEREOF

摘要

Disclosed is a rotation driving device of a vacuum apparatus for rotating a substrate. According to an embodiment of the present invention, the rotation driving device of the vacuum apparatus for rotating the substrate includes: a fixed pipe shaft unit installed in a vacuum space; a rotational pipe shaft unit installed on the fixed pipe shaft unit to be able to rotate; and a rotation driving unit which is installed inside the fixed pipe shaft unit, and is joined to the rotational pipe shaft unit to rotate the rotational pipe shaft unit.