LASER PROCESSING APPARATUS,申请号JP20120281993-传众专利搜索

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发明名称	LASER PROCESSING APPARATUS
摘要	PROBLEM TO BE SOLVED: To provide a galvano scanner that can easily prevent plane tilt of a galvano mirror and prevent a processing position from being displaced.SOLUTION: A magnet 33X is arranged in the vicinity of a back face of a conductive galvano mirror 35X, or arranged in the vicinity of a conductive member 32X fixed to a galvano mirror 351X. Thus, if a plane tilt occurs, a Lorentz force for suppressing the plane tilt acts on the galvano mirror 35X or on the conductive member 32X, suppressing the plane tilt.
申请公布号	JP2014126626(A)	申请公布日期	2014.07.07
申请号	JP20120281993	申请日期	2012.12.26
申请人	MITSUBISHI ELECTRIC CORP	发明人	HOKODATE TOSHIYUKI ; TAKAHASHI NAOHIRO ; UCHIYAMA KENGO ; TAKAHASHI YOSHIFUMI
分类号	G02B26/10;B23K26/00;B23K26/064;B23K26/082	主分类号	G02B26/10
代理机构		代理人
主权项
地址

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