GAS SENSOR AND MANUFACTURING METHOD THEREOF

摘要

Disclosed are a gas sensor and a manufacturing method thereof. The gas sensor having improved durability according to an embodiment of the present invention comprises a membrane which is mounted on a substrate and has a plurality of through holes; a sensing part which is formed at the upper part and the lower part of the membrane and has a structure connected through the through holes; a heating unit which is mounted above the membrane for heating the sensing part; a sensing electrode which gets in contact with both ends of the sensing part to measure the electric change of the sensing part; and an insulation film formed for electric insulation between the heating unit and the sensing electrode.