| 摘要 |
<p>Provided is an evaporation source heater. An evaporation source heater according to an embodiment includes a tubular reflector having a crucible inserted inside and enclosing the outer peripheral surface of the crucible; a heating member having a first heating strip, formed by horizontal portions arranged horizontally and connecting portions extending downward from an end portion of each horizontal portion in a repeated zigzag pattern, forms the heating surface and being disposed in the reflector so that the heating surface encloses the outer peripheral surface of the crucible; and a heating member fixing part for fixing the heating member to the inside of the reflector.</p> |
