| 摘要 |
In a transfer apparatus, a SCARA arm is provided on an elevation platform. Further, a sensor arranged to detect inclination at a tip end of the arm and a sensor arranged to measure a position of an article on the arm are provided. A base is tilted to eliminate inclination of the detected inclination, and a stretching amount of the arm is corrected in correspondence with the measured position of the article on the arm.
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