| 发明名称 |
METHOD AND SYSTEM FOR IN-LINE REAL-TIME CALCULATION OF SEMICONDUCTOR LAYER THICKNESSES |
| 摘要 |
<p>A method and system for real-time, in-line measurements of thicknesses of semiconductor layers of photovoltaic devices is provided. The method and system include taking ex-situ optical data measurements after deposition of the semiconductor layers. The measurements are then used to calculate the thicknesses of the layers in real-time using optical modeling software.</p> |
| 申请公布号 |
WO2014105555(A1) |
申请公布日期 |
2014.07.03 |
| 申请号 |
WO2013US76055 |
申请日期 |
2013.12.18 |
| 申请人 |
FIRST SOLAR, INC. |
发明人 |
BULLER, BENYAMIN;HWANG, DAVID;MILLIRON, BENJAMIN;ROBERTS, DALE;SHAO, RUI;ZHAO, ZHIBO |
| 分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
| 代理机构 |
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