METHOD FOR FABRICATING ARRAY SUBSTRATE

摘要

Disclosed is a method for fabricating an array substrate, comprising: forming a pattern layer comprising a gate and a gate connection on a substrate; sequentially forming an insulation layer film and an active layer film on the substrate, and forming a pattern of a gate insulation layer having a first via hole and a pattern of an active layer through a single patterning process, wherein the first via hole is located above the gate connection; sequentially forming a transparent conductive film and a metal film on the substrate, and forming a pattern layer comprising a first electrode and a pattern layer comprising a data line, a source, a drain and a TFT channel through a single patterning process.

主权项

1. A method for fabricating an array substrate, comprising:
forming a pattern layer comprising a gate and a gate connection on a substrate; sequentially forming an insulation layer film and an active layer film on the substrate, and forming a pattern of a gate insulation layer having a first via hole and a pattern of an active layer through a single patterning process, wherein the first via hole is located above the gate connection; sequentially forming a transparent conductive film and a metal film on the substrate, and forming a pattern layer comprising a first electrode and a pattern layer comprising a data line, a source, a drain and a TFT channel through a single patterning process.