发明名称 PROTECTIVE COATING TO PREVENT REACTION BETWEEN GRAPHITE SUSCEPTOR AND QUARTZ CRUCIBLE
摘要 A susceptor for supporting a crucible includes a body with an interior surface defining a cavity. A coating is disposed on the interior surface to provide a barrier for preventing contact between the body of the susceptor and the crucible disposed within the cavity.
申请公布号 US2014182511(A1) 申请公布日期 2014.07.03
申请号 US201314141101 申请日期 2013.12.26
申请人 SunEdison, Inc. 发明人 Rathod Shailendra B.;Phillips Richard J.
分类号 C30B15/10;C09D1/00 主分类号 C30B15/10
代理机构 代理人
主权项 1. A susceptor for supporting a crucible, the susceptor comprising: a body having an interior surface defining a cavity, the cavity having a size and shape complementary to an outer size and shape of the crucible; and a coating on the interior surface, the coating providing a barrier for preventing contact between the body of the susceptor and the crucible disposed within the cavity.
地址 St. Peters MO US