发明名称 |
PROTECTIVE COATING TO PREVENT REACTION BETWEEN GRAPHITE SUSCEPTOR AND QUARTZ CRUCIBLE |
摘要 |
A susceptor for supporting a crucible includes a body with an interior surface defining a cavity. A coating is disposed on the interior surface to provide a barrier for preventing contact between the body of the susceptor and the crucible disposed within the cavity. |
申请公布号 |
US2014182511(A1) |
申请公布日期 |
2014.07.03 |
申请号 |
US201314141101 |
申请日期 |
2013.12.26 |
申请人 |
SunEdison, Inc. |
发明人 |
Rathod Shailendra B.;Phillips Richard J. |
分类号 |
C30B15/10;C09D1/00 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
|
主权项 |
1. A susceptor for supporting a crucible, the susceptor comprising:
a body having an interior surface defining a cavity, the cavity having a size and shape complementary to an outer size and shape of the crucible; and a coating on the interior surface, the coating providing a barrier for preventing contact between the body of the susceptor and the crucible disposed within the cavity. |
地址 |
St. Peters MO US |