主权项 |
1. An optical semiconductor device comprising:
a first semiconductor layer of a first conductivity type; an active layer provided on the first semiconductor layer, the active layer having a ring- or disk-like shape; a second semiconductor layer of a second conductivity type provided on the active layer, the second semiconductor layer having a ring- or disk-like shape; a first electrode provided on the first semiconductor layer; and a second electrode provided on the second semiconductor layer, wherein the first semiconductor layer includes a first region having a ring- or disk-like shape and a second region provided around an outer circumference of the first region, the second region having a smaller thickness than the first region, the first electrode is provided on the second region, and a groove or a plurality of holes are provided in a portion of the second region, the portion being located between the first region and the first electrode. |