发明名称
摘要 A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.
申请公布号 JP5535108(B2) 申请公布日期 2014.07.02
申请号 JP20110060899 申请日期 2011.03.18
申请人 发明人
分类号 H01L21/027;G02B5/10;G02B7/198;G03F7/20;G21K1/06 主分类号 H01L21/027
代理机构 代理人
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