Ozone gas supply system

摘要

An ozone gas supply system (10) for supplying an ozone gas to each of a plurality of ozone treatment apparatuses while controlling a flow rate and a concentration of the gas, said ozone gas supply system comprising a plurality of ozone generation units (7-1 to 7-n). Said ozone gas supply system further comprises: an ozone gas output flow rate management unit (9) configured to receive a plurality of ozone gas outputs from a plurality of ozone generators in said plurality of ozone generation units, and be capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of said plurality of ozone gas outputs to any of said plurality of ozone treatment apparatuses by means of an opening/closing operation of a plurality of ozone gas control valves (9a, 9b, 9c, 9bc, 9ab, 9ca) provided in said ozone gas output flow rate management unit; and an ozone gas output flow rate management unit control part (8) for, based on a process ozone gas event signal (16) supplied from each of said plurality of ozone treatment apparatuses, controlling said ozone gas output of each said plurality of ozone generation units and causing said ozone gas output flow rate management unit to control said ozone gas output flow rate.