| 摘要 |
An inertial sensor according to the present invention comprises a sensor unit including a mass, a flexible substrate including a driving means which supports the mass to be displaced and moves the mass and a detection means which detects the movement of the mass, a support unit which supports the flexible substrate to allow the mass to freely move in a state in which the mass floats, and a lower cap which covers the lower part of the mass and is coupled to the support unit; an ASIC in which the sensor unit is stacked and coupled; a printed circuit board in which the ASIC is stacked and connected and which is electrically connected to the sensor unit and the ASIC by a wire; and a metal deposition unit which covers the sensor unit and the ASIC and includes a cap coupled to the printed circuit board, wherein the cap is to earth a junction part with the printed circuit board. |
