发明名称 Dicing tape-integrated wafer back surface protective film
摘要 The present invention provides a dicing tape-integrated wafer back surface protective film including: a dicing tape including a base material and a pressure-sensitive adhesive layer formed on the base material; and a wafer back surface protective film formed on the pressure-sensitive adhesive layer of the dicing tape, in which the wafer back surface protective film is colored. It is preferable that the colored wafer back surface protective film has a laser marking ability. The dicing tape-integrated wafer back surface protective film can be suitably used for a flip chip-mounted semiconductor device.
申请公布号 US8766462(B2) 申请公布日期 2014.07.01
申请号 US201314095230 申请日期 2013.12.03
申请人 Nitto Denko Corporation 发明人 Takamoto Naohide;Matsumura Takeshi
分类号 H01L23/48;H01L23/52;H01L29/40 主分类号 H01L23/48
代理机构 Sughrue Mion, PLLC 代理人 Sughrue Mion, PLLC
主权项 1. A dicing tape-integrated wafer back surface protective film comprising: a dicing tape comprising a base material and a pressure-sensitive adhesive layer formed on the base material; and a wafer back surface protective film formed on the pressure-sensitive adhesive layer of the dicing tape, wherein the wafer back surface protective film is colored, wherein said colored wafer back surface protective film has an elastic modulus at 23° C. of 1 GPa or more, and wherein said colored wafer back surface protective film has a ratio of weight decrease of 1% by weight or less after heating at a temperature of 250° C. for 1 hour.
地址 Osaka JP