发明名称 |
Dicing tape-integrated wafer back surface protective film |
摘要 |
The present invention provides a dicing tape-integrated wafer back surface protective film including: a dicing tape including a base material and a pressure-sensitive adhesive layer formed on the base material; and a wafer back surface protective film formed on the pressure-sensitive adhesive layer of the dicing tape, in which the wafer back surface protective film is colored. It is preferable that the colored wafer back surface protective film has a laser marking ability. The dicing tape-integrated wafer back surface protective film can be suitably used for a flip chip-mounted semiconductor device. |
申请公布号 |
US8766462(B2) |
申请公布日期 |
2014.07.01 |
申请号 |
US201314095230 |
申请日期 |
2013.12.03 |
申请人 |
Nitto Denko Corporation |
发明人 |
Takamoto Naohide;Matsumura Takeshi |
分类号 |
H01L23/48;H01L23/52;H01L29/40 |
主分类号 |
H01L23/48 |
代理机构 |
Sughrue Mion, PLLC |
代理人 |
Sughrue Mion, PLLC |
主权项 |
1. A dicing tape-integrated wafer back surface protective film comprising:
a dicing tape comprising a base material and a pressure-sensitive adhesive layer formed on the base material; and a wafer back surface protective film formed on the pressure-sensitive adhesive layer of the dicing tape, wherein the wafer back surface protective film is colored, wherein said colored wafer back surface protective film has an elastic modulus at 23° C. of 1 GPa or more, and wherein said colored wafer back surface protective film has a ratio of weight decrease of 1% by weight or less after heating at a temperature of 250° C. for 1 hour. |
地址 |
Osaka JP |