Semiconductor device with ultra thin silicide layer

摘要

A manufacturing method of a semiconductor device comprises the following steps. First, a substrate is provided, at least one fin structure is formed on the substrate, and a metal layer is then deposited on the fin structure to form a salicide layer. After depositing the metal layer, the metal layer is removed but no RTP is performed before the metal layer is removed. Then a RTP is performed after the metal layer is removed.

主权项

1. A semiconductor device, comprising:
a substrate, with a plurality of fin structures on the substrate; a silicide layer deposited on a surface and two sidewalls of each fin structure, wherein the thickness of the silicide layer is uniform; and the thickness of the silicide layer is between 2-4 nanometers; and a plurality of slot contacts, each slot contact disposed on a plurality of fin structures.