System for uniform structuring of substrates

摘要

A system for transferring a nanostructure from a die to a flat side of a large-area substrate. The system has a substrate holder that receives the substrate on a substrate receiving surface. A structural surface of the die is oriented parallel to and opposite the substrate receiving surface. An adjusting means receives the substrate holder and adjusts the position of the substrate relative to the die in an x-direction, y-direction and a rotational direction. An actuator device includes at least two separately controllable actuators that each independently imposes a force in a direction orthogonal to the substrate receiving surface. A force measuring cell is in each actuator for measuring the force applied on the die or substrate. The forces, in combination, produce a single, controllable resultant force at a predetermined location. The single, resultant force is orientated in a direction orthogonal to the substrate receiving surface of the substrate holder.

主权项

1. A system for transferring a shape on a die to a flat side of a large-area substrate, said system comprising:
a substrate holder having a substrate receiving surface for receiving the substrate, a structural surface of the die, the structural surface defining a shape to be transferred to the substrate and being oriented parallel to and located opposite to the substrate receiving surface of the substrate holder, an adjusting means having a surface for receiving the substrate holder, the adjusting means for adjusting the position of the substrate relative to the die in an x-direction, y-direction and a rotational direction; an actuator device that applies at least two forces in a direction orthogonal to the substrate receiving surface of the substrate holder, wherein the actuator device is comprised of at least two separately controllable actuators that each independently impose a force on the die or substrate, and a force measuring cell integrated in each of said separately controllable actuators for measuring the force applied on the die or substrate by each of said separately controllable actuators, wherein the forces imposed by the actuators in combination produce a single, controllable resultant force at a predetermined location based on the shape to be transferred to the substrate, and wherein the single, controllable resultant force is orientated in a direction orthogonal to the substrate receiving surface of the substrate holder.