| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a power feeding device and the like for a discharge load, that feeds a high-frequency high voltage to the discharge load with safety and with efficiency by transmitting an output of a middle-point grounded power supply by using a plurality of coaxial lines.SOLUTION: A power feeding device for a discharge load that supplies a power of a high-frequency high-voltage AC waveform from an inverter power supply (300) to the discharge load (10), feeds the output power of the inverter power supply grounded at an intermediate potential of respective phases to the discharge load via a coaxial line part having a plurality of coaxial lines. Respective phases of the output of the inverter power supply are connected to center conductors (21a and 22a) of paired coaxial lines of different combinations among the plurality of coaxial lines respectively to feed a power to the discharge load. External conductors (21b and 22b) of the plurality of coaxial lines are respectively grounded.</p> |
