| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inductive position measuring device for detecting a moving amount in a direction orthogonal to a measuring direction, by a simple method.SOLUTION: Scanning detection elements include exciting wirings 1.4 and 1.5, and three receiver tracks 1.1, 1.2, and 1.3. The first and second receiver tracks 1.1 and 1.2 are arranged at an interval Z1 extending orthogonally to a first direction X, and the third receiver track 1.2 is arranged between the first and second receiver tracks 1.1 and 1.2. In scale elements, two scale tracks 2.1 and 2.2 are arranged at an interval Z2, and have scale periods P2.1 and P2.2. An electromagnetic field generated by the exciting wirings 1.4 and 1.5 is modulated by the scale tracks 2.1 and 2.2. A relative position in the first direction X is detected by the first and second receiver tracks 1.1 and 1.2, and a relative position in a second direction Z orthogonal to the first direction X is detected by the third receiver track 1.3.</p> |
